About: http://webisa.webdatacommons.org/289137583

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A popular method of forming metal wiring is a damascene process in which a metal is deposited in an opening such as a via hole or a trench above a via in a dielectric layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr