About: http://webisa.webdatacommons.org/289166272

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process as claimed in claim 1, wherein said dopant is an p+ ion for an n-type substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com