PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • However, in one embodiment of the present invention, second insulating layer 26 may also be subjected to a planarization process, such as CMP, ECMP, etching, sputtering, or the like, to facilitate formation of substantially planar surface 28.
http://www.w3.org/ns/prov#wasQuotedFrom
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