About: http://webisa.webdatacommons.org/289387553

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a single-substrate processing chamber for 300 mm wafers may have a capacity of less than about 100 liters, particularly less than about 30 liters.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com