| http://www.w3.org/ns/prov#value | - For example, polyimide, HMOSO, TOMCAT, or TEOS can be used. [0116] As described above, according to the fourth embodiment, the flatness of the surface onto which the element to be driven such as an organic EL element, is formed can be improved, and thus, it is possible to improve the reliability of the element to be driven.
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