About: http://webisa.webdatacommons.org/28962104

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Metal layers 14 and 16 are optional, and may be any suitable conductive metal, such as copper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com