About: http://webisa.webdatacommons.org/290393845

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 1, as a substrate processing apparatus relevant to an embodiment of the present invention, the vertical CVD apparatus includes a reaction vessel 210 configured to process substrates such as wafers 200.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es