About: http://webisa.webdatacommons.org/290423247

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring now to FIG. 3F, vias 322 are formed in the second insulating layer 324 using methods known in the art, such as photolithographic and etching techniques, to expose a portion of a respective first electrode 312.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com