| http://www.w3.org/ns/prov#value | - Referring to FIG. 4A, by successively performing the same steps as those illustrated in FIGS. 2A to 2F, a contact plug 114 and a barrier layer 112, the top portion of which is recessed into a first contact hole H1 within a first insulating interlayer 110, are formed, and a catalyst layer 116 is formed in such a manner so as to fill the upper-end portion of the first contact hole H1.
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