About: http://webisa.webdatacommons.org/290794108

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	design is essential to attaining very uniform sputtered films, particularly in reactive sputtering processes, and most especially when depositing insulating layers, such as titanium oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com