About: http://webisa.webdatacommons.org/291121169

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In yet another embodiment, an alternate sputtering gas, such as neon, krypton, or a mixture including argon, is employed to reduce the warpage and deformation of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com