About: http://webisa.webdatacommons.org/291186146

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ny etch rate enhancement described, nor are any elements other than Pb, Zr, and Ti discussed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr