About: http://webisa.webdatacommons.org/291256944

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another aspect, the present invention is a method of manufacturing an integrated circuit device on an SOI wafer having a semiconductor layer disposed on an insulating layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com