About: http://webisa.webdatacommons.org/291316381

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As will be described by reference to later figures, the assembly 105 comprises a support (e.g. ???head??? or ???wafer carrier???) having mounted thereon a piece such as a wafer to be polished, as well as a quartz crystal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com