| http://www.w3.org/ns/prov#value | - As shown in FIG. 2J, an SrRuO3 film 43 to be employed as an upper electrode is then deposited to a thickness of 100 nm. [0076] Next, as in the case of the Example 1, the SrRuO3 film 43 is patterned so as to cover a region including a plurality of the lower electrodes, thereby forming an upper electrode.
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