About: http://webisa.webdatacommons.org/291568788

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the substrate can be etched using etch and mask techniques to form isolation trenches which are then filled with dielectric materials such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com