About: http://webisa.webdatacommons.org/291592717

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a plurality of accelerometers shown in the accompanying drawings, including FIG. 26, can be fabricated on a single substrate or from a single silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr