About: http://webisa.webdatacommons.org/291646494

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, prior art metrology tools and methods are not sufficient to provide the types of images that may enable fault detections to be performed for this type of tools.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com