About: http://webisa.webdatacommons.org/291889840

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example,a solution of the aforementioned precursor (polyamic acid) is coated on a substrate such as a silicon wafer, and heated up stepwise starting from 150.degree.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com