About: http://webisa.webdatacommons.org/292021267

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the source electrode 14 and the gate electrode 13' are formed in an interdigital pattern as shown in FIG. 2A. Si is used usually as a semiconductor and, in some cases, elements such as Ge, GaAs and InP are used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es