About: http://webisa.webdatacommons.org/292045902

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In microelectromechanical systems (MEMS), the functional element, such as a circuit, sensor or actuator, must often be separated from the environment, yet electrical signals must be sent to and received from the functional element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au