About: http://webisa.webdatacommons.org/292083285

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 4(b), the trench is filled with an insulating material such as silicon ioxide, silicon nitride, undoped polysilicon, or a combination of such materials, which do not adversely affect the characteristics of the final device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es