About: http://webisa.webdatacommons.org/292140089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In various embodiments, a hafnium silicon oxynitride film may be doped with elements or compounds other than hafnium, silicon, oxygen, and nitrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au