About: http://webisa.webdatacommons.org/292173832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating film is formed between the substrate 10 and the semiconductor film 11 to serve as a base film for preventing an alkaline metal or other impurities contained in the substrate 10 from entering the semiconductor film 11.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr