About: http://webisa.webdatacommons.org/292208475

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, the main patterns 32 may include other types of the features in the integrated circuit, for example, contact plugs, vias, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com