About: http://webisa.webdatacommons.org/292280233

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In a first aspect, the present invention is a system and technique for inspecting integrated circuits, including, for example, patterns projected, provided or formed on a wafer using photomasks, or patterns on the photomask itself.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com