About: http://webisa.webdatacommons.org/292329501

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, separate material delivery systems are required for the two different materials, however only one waste collection system is needed since the waste is a combination of both materials collected after planarizing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au