| http://www.w3.org/ns/prov#value | - In contrast, in the CVD-TiN layer with excellent step coverage, substantially no oxygen was detected except on the surface as shown in FIG. 2B. This contrast may be logically explained by a supposition that since the PVD-TiN layer had small crystal grain particles as compared with the PVD-TiN layer, the former layer permitted easier entrance of oxygen from the ambient air than the latter layer.
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