About: http://webisa.webdatacommons.org/292608916

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Openings or apertures for interconnect features, such as contacts and vias, are etched in the dielectric layer (step 210).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com