About: http://webisa.webdatacommons.org/292819119

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5A is a diagram of an optical path when the tilt angle of a micromirror is +12 degrees, in other words, the laser beam delivered through the DMD 404 and the projection lens 405 to the substrate 408.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com