About: http://webisa.webdatacommons.org/292874261

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silica or other materials may be used as a support in place of silicon nitride, and may provide improved metal adhesion.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca