About: http://webisa.webdatacommons.org/29296454

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS devices are used in a variety of applications such as optical display systems, pressure sensors, flow sensors, and charge-control actuators.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com