About: http://webisa.webdatacommons.org/293101948

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the light irradiation unit exposes the substrate holding apparatus using a light source other than a light source for transferring a pattern formed in a reticle onto a wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com