About: http://webisa.webdatacommons.org/293390904

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with one aspect of the invention, a substrate, such as a silicon wafer, is coated with a layer of dielectric material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com