| http://www.w3.org/ns/prov#value | - An interlayer insulating film is formed of a first interlayer insulating film 816 which is made of an inorganic material such as silicon oxide, silicon nitride or silicon oxynitride and which is 50-500 nm thick, and a second interlayer insulating film 817 which is made of an organic insulator material such as polyimide, an acrylic resin, polyimideamide or BCB (benzocyclobutene).
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