About: http://webisa.webdatacommons.org/293445757

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In all of these applications, the performance and reliability of the copper films are critically determined by their microstructure, including grain shape, grain size, grain distribution, defect density and texture.
http://www.w3.org/ns/prov#wasQuotedFrom	nitrkl.ac.in