About: http://webisa.webdatacommons.org/293565994

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment of the present invention interpoly dielectric is a composite oxide comprising a lower thermally grown or deposited oxide film, a middle deposited silicon nitride film and a top deposited oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com