About: http://webisa.webdatacommons.org/293604732

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, the first barrier layer or the second barrier layer may be composed of, for example, an inorganic compound, such as alumina or a tantalum oxide, titanium oxide or the like, besides the silicon compound.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com