| http://www.w3.org/ns/prov#value | - In alternative embodiments, material in fill region 60 could also be made of materials such as polyimide, BCB (benzocyclobutene), SiO)2, Si3N4, or other dielectrics, AIN, ZnO, LiNbO3, PZT, LiTaO3, Al2O 3, or other piezoelectric materials, Pt, W, Cu, Al, Au, Ag, or other metals or alloys of metals.
|
