About: http://webisa.webdatacommons.org/293671272

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other embodiments, the spaces between the hardmask pillars 1202, 1204, 1206 can be filled with a conductive material, such as aluminum, to form the conductive areas of the semiconductor in later processing steps.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com