About: http://webisa.webdatacommons.org/293689494

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the gate electrode material is metal, then metals such as TiN, TaN or Mo would be deposited by physical vapor deposition (PVD) and patterned at etched in an analogous fashion
http://www.w3.org/ns/prov#wasQuotedFrom	google.com