About: http://webisa.webdatacommons.org/293789495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A first insulating layer, such as silicon oxide, is deposited on the substrate and planarized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es