About: http://webisa.webdatacommons.org/29393097

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, the layer covered by the photoresist layer is the layer to be etched, such as the Si layer, oxide layer, nitride layer or the like in the semiconductor process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com