| http://www.w3.org/ns/prov#value | - rUS7808042Mar 20, 2008Oct 5, 2010Micron Technology, Inc.Systems and devices including multi-gate transistors and methods of using, making, and operating the sameUS7829269Sep 22, 2009Nov 9, 2010Tokyo Electron LimitedDual tone development with plural photo-acid generators in lithographic applicationsUS7851309Apr 6, 2009Dec 14, 2010Micron Technology, Inc.Selective epitaxy vertical integrated circuit
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