| http://www.w3.org/ns/prov#value | - Preferably, the substrate is a semiconductor wafer having an existing pattern with non-planar topology or non-uniformly reflective features on the surface, treating the substrate by applying an anti-reflective coating to delineate the desired pattern on the non-planar substrate surface, the medium or property being an optical exposure phenomenon which is activated by illuminating the non-planar su
|
