| http://www.w3.org/ns/prov#value | - Preferably, a great majority of the opening volume is filled with the metallization layer 12 (e.g., 90% or more) since the metallization layer 12 is a soft, low resistivity metal such as aluminum, copper, aluminum-copper alloys, as well as ternary alloys and multicomponent systems including elements such as aluminum and copper, and will fulfill the function of interconnecting the many structures o
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