| http://www.w3.org/ns/prov#value | - ronment, the passivation layer including a compound having a formula selected from the group consisting of M(O)yXz, M(O)yXzWn, MxXy, and combinations thereof, wherein O stands for oxygen, M is any species present in the dielectric insulating film other than oxygen or nitrogen, and wherein X, and W are selected from the group consisting of nitrogen, fluorine, carbon, chlorine, iodine, and CO3, and
|