| http://www.w3.org/ns/prov#value | - rically connected to said drawing-out electrode at the bottom of said contact hole; said drawing-out electrode has at least two different metal layers in a region larger than a bottom of said contact hole, said region including the bottom of said contact hole; and a metal layer which is an uppermost layer of said drawing-out electrode is removed at the bottom of said contact hole in the direction
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