| http://www.w3.org/ns/prov#value | - A reticle inspecting apparatus in a seventh aspect of the present invention for inspecting a reticle, fabricated by forming a pattern of an opaque or light-transmissive film on a substrate, for defects, such as foreign particles adhering to the substrate, comprises: an inspection stage unit including an inspection stage for supporting the reticle, capable of optionally moving in directions along a
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