| http://www.w3.org/ns/prov#value | - Pre-metal dielectric film 14 can be one or more layers of dielectric material, with each layer formed of doped oxide, borophosphosilica glass (BPSG), undoped silica glass (USG), spin on glass(SOG), borosilica glass (BSG), phosphosilicate glass (PSG) or tetraethylorthosilicate (TEOS), oxynitride or other dielectric material that can be selectively etched relative to the material in barrier layer 13
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